Compact infrared dryer for IC
On the fab floor, you know the drill: a photoresist bake that drifts even 0.2°C can pull critical dimension control off-spec and eat into yield. You...
Short wave infrared lamp for IC
On the fab floor, you learn fast: a 0.1°C drift in bake temperature can shift a critical dimension by nanometers and wipe out hours of lithography...